The Centre for Materials and Microsystems of FBK (Fondazione Bruno Kessler) has tens of years of experience in the development of silicon-based radiation sensors for different scientific and technological applications.
The Micro Nano Facility (MNF) Unit runs a dedicated silicon radiation detectors cleanroom, where full, single- and double-sided detector processes, including ion implantation, can be performed and of research prototypes as well as small scale productions can be fabricated. MNF also runs a parametric testing laboratory allowing the automatic electrical characterization of all the devices on the silicon wafer, and hence appropriate quality controls. MNF is certified according to the ISO 9001:2015 standard. The flagship products of the unit are large area silicon drift detectors (SDDs), low gain avalanche detectors (LGADs) and 3D silicon detectors.
The Integrated Radiation and Image Sensors unit is focussed on silicon-based sensors, either using dedicated technology processes in the MNF cleanroom or state-of-the-art CMOS technologies, with special and fully customizable features. Single-photon avalanche diodes, silicon photomultipliers (SiPMs) and strip detectors (SSDs), custom image sensors and infrared and terahertz sensing devices are among the expertise of the research unit. The solutions portfolio addresses the many points between sensor concept and system testing, like the study and physical design of the sensor device, the tuning of the fabrication process and its implementation, the design and simulations of integrated electronics, the development of module- and system-level electronics and optics with complete electrical and optical characterization.
Recent investments started to enable the seamless integration of high-performance custom detectors with state-of-the-art CMOS readout and a dedicated packaging and integration cleanroom has recently been equipped and brought into operation.
In this seminar the fabrication and characterization capabilities of FBK-CMM will be presented through its radiation sensors portfolio including the following: