Sapphire wafers from Univ. Wagers: first measurements

Mauro M. for the PD group involved (U. Dosselli, S. Mattiazzo, D. Pantano)

6/12/2021

Wafer arrived from University Wafer on June 10

Wafers measured on Jun 11

# balance Mettler BD 202 - accuracy: 0.01 g

# Mitutoyo metrology equipment Euro-c-a7106 - accuracy: ~ 2 micron

Weight measurements outcome

Thickness measurements

Outcome of measurements

wafer
thickness
from nominal
min
max
range
thickness stdev
meas rel error
weight
dens
dens error
[micron]
[%]
[micron]
[micron]
[micron]
[micron]
[%]
[g]
[g/cm3]
[g/cm3]
Measurement outcome
UW1-01 153.70 2.47 151.00 158.00 7 2.0 0.87 1.21 3.88 0.03
UW1-04 146.52 -2.32 143.75 152.75 9 2.2 0.92 1.17 3.94 0.04

Nominal tickness tolerance declared by Uinv. Wafers: +/- 20 Nominal syntethic sapphire density = 3.98 g/cm³

Estimated thickness