Sapphire wafers from Univ. Wagers: first measurements

Mauro M. for the PD group involved (U. Dosselli, S. Mattiazzo, D. Pantano)

6/12/2021

Wafer arrived from University Wafer on June 10

Wafers measured on Jun 11

# balance Mettler BD 202 - accuracy: 0.01 g

# Mitutoyo metrology equipment Euro-c-a7106 - accuracy: ~ 2 micron

Weight measurements outcome

Thickness measurements

Outcome of measurements

wafer
thickness
from nominal
min
max
range
thickness stdev
meas rel error
weight
dens
dens error
[micron]
[%]
[micron]
[micron]
[micron]
[micron]
[%]
[g]
[g/cm3]
[g/cm3]
Measurement outcome
UW1-01 153.70 2.47 151.00 158.00 7 2.0 0.87 1.21 3.88 0.03
UW1-04 146.52 -2.32 143.75 152.75 9 2.2 0.92 1.17 3.94 0.04

Nominal tickness tolerance declared by Uinv. Wafers: +/- 20 Nominal syntethic sapphire density = 3.98 g/cm³

Estimated thickness

Thickness measurements 29giu21

Outcome of measurements

Zero reference measurements

Measurement plots

Measurement summary

wafers

wafer
thickness
from nominal
min
max
range
thickness stdev
meas rel error
[micron]
[%]
[micron]
[micron]
[micron]
[micron]
[%]
Measurement outcome
WP1-1 110.78 10.78 107.25 115.25 8 1.68 0.86
WP1-10 109.63 9.63 106.75 113.75 7 1.51 0.87
WP1-2 112.23 12.23 105.62 120.62 15 3.08 0.85
WP1-3 111.55 11.55 104.75 119.75 15 2.85 0.85
WP1-4 112.14 12.14 105.62 119.62 14 2.74 0.85
WP1-5 111.65 11.65 107.88 116.88 9 1.89 0.85
WP1-6 110.69 10.69 107.75 115.75 8 1.82 0.86
WP1-7 110.79 10.79 108.50 113.50 5 1.34 0.86
WP1-8 110.27 10.27 106.86 113.86 7 1.52 0.86
WP1-9 111.81 11.81 108.88 114.88 6 1.58 0.85

no wafer

wafer
thickness
from nominal
min
max
range
thickness stdev
meas rel error
[micron]
[%]
[micron]
[micron]
[micron]
[micron]
[%]
Measurement outcome
WP1-0 -0.42 -100.42 -3.75 1.25 5 0.86 -228.67