Speaker
Description
Properties of nanostructured surfaces are determined by their composition,
size and shape. In the semiconductor industry, the continuously shrinking
dimensions of the features and their increasing complexity require innovative metrology solutions. Non-destructive methods with high throughput that are able to assess complex 3D structures are of major importance. Measurement techniques based on light-structure interaction allow fast and non-destructive inspection of structured areas and are already widely used from the infrared to the hard X-ray spectral range.
PTB’s radiometric capabilities allow accessing fluorescence, scattering and reflected signals in a quantitative and traceable manner. Grazing-incidence scattering and fluorescence techniques have been successfully used for the dimensional characterization of line shapes of lamellar gratings and three-dimensional structures, however the beam-footprint in those techniques is larger than the target field under study. We explore the applicability of near-normal-incidence techniques, combining grazing-exit X-ray fluorescence and small-angle X-ray scattering, so-called hybrid metrology, to investigate the material spatial distribution within a nanostructure.
| I plan to submit also conference proceedings | Yes |
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